Please use this identifier to cite or link to this item:
https://hdl.handle.net/2440/35417
Type: | Conference paper |
Title: | Trajectory following with a three-DOF micro-motion stage |
Author: | Yong, Y. Lu, T. Minase, J. |
Citation: | Proceedings of the Australasian Conference on Robotics and Automation 2006 / MacDonald, Bruce (ed.) |
Publisher: | ARAA |
Publisher Place: | New Zealand |
Issue Date: | 2006 |
ISBN: | 9780958758383 |
Conference Name: | Australasian Conference on Robotics and Automation (2006 : Auckland, New Zealand) |
Editor: | Bruce MacDonald, |
Statement of Responsibility: | Yuen Kuan Yong, Tien-Fu Lu and Jayesh Minase |
Abstract: | This paper presents the position control of a three-DOF (degree-of-freedom) micro-motion stage. This stage provides micro scale planar motion along the x and y axis and rotational motion along the z axis. It uses a 3 RRR (three revolute-revolute-revolute) °exure hinge based compliant mechanism driven by three piezo- electric stack actuators to achieve the micro motion along x, y and z axis. The micro-motion stage with operating frequency up to 1Hz is controlled to follow a prescribed circular tra- jectory. An analytical Jacobian of the stage is derived to relate the input displacements of the piezo-actuators to the output displacements of the stage. Closed-loop positioning control is achieved using the standard PI controller. The errors related to the position control along the x and y axis are presented. |
Published version: | http://www.araa.asn.au/acra/acra2006/papers/paper_5_48.pdf |
Appears in Collections: | Aurora harvest Mechanical Engineering conference papers |
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