Please use this identifier to cite or link to this item: https://hdl.handle.net/2440/35417
Type: Conference paper
Title: Trajectory following with a three-DOF micro-motion stage
Author: Yong, Y.
Lu, T.
Minase, J.
Citation: Proceedings of the Australasian Conference on Robotics and Automation 2006 / MacDonald, Bruce (ed.)
Publisher: ARAA
Publisher Place: New Zealand
Issue Date: 2006
ISBN: 9780958758383
Conference Name: Australasian Conference on Robotics and Automation (2006 : Auckland, New Zealand)
Editor: Bruce MacDonald,
Statement of
Responsibility: 
Yuen Kuan Yong, Tien-Fu Lu and Jayesh Minase
Abstract: This paper presents the position control of a three-DOF (degree-of-freedom) micro-motion stage. This stage provides micro scale planar motion along the x and y axis and rotational motion along the z axis. It uses a 3 RRR (three revolute-revolute-revolute) °exure hinge based compliant mechanism driven by three piezo- electric stack actuators to achieve the micro motion along x, y and z axis. The micro-motion stage with operating frequency up to 1Hz is controlled to follow a prescribed circular tra- jectory. An analytical Jacobian of the stage is derived to relate the input displacements of the piezo-actuators to the output displacements of the stage. Closed-loop positioning control is achieved using the standard PI controller. The errors related to the position control along the x and y axis are presented.
Published version: http://www.araa.asn.au/acra/acra2006/papers/paper_5_48.pdf
Appears in Collections:Aurora harvest
Mechanical Engineering conference papers

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