Finite element analysis of wirelessly interrogated implantable bio-MEMS

Abstract

Wirelessly interrogated bio-MEMS devices are becoming more popular due to many challenges, such as improving the diagnosis, monitoring, and patient wellbeing. The authors present here a passive, low power and small area device, which can be interrogated wirelessly using a uniquely coded signal for a secure and reliable operation. The proposed new approach relies on converting the interrogating coded signal to surface acoustic wave that is then correlated with an embedded code. The suggested method is implemented to operate a micropump, which consist of a specially designed corrugated microdiaphragm to modulate the fluid flow in microchannels. Finite Element Analysis of the micropump operation is presented and a performance was analysed. Design parameters of the diaphragm design were finetuned for optimal performance and different polymer based materials were used in various parts of the micropump to allow for better flexibility and high reliability.